Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching
Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching
A simple one-step inductively coupled plasma etching technique has been developed for the fabrication of SiC resonant beam structures. Straight cantilever and bridge devices have been made successfully. The structures have been actuated and resonant frequencies ranging from ~120 kHz to ~5 MHz have been measured. Comparison of the theoretically simulated and experimentally measured resonant frequencies shows the presence of significant tensile stress in bridge structures while the cantilever beams are free of stress. The degree of the tension in the bridge structures has been found to be independent of the bridge length.
2998-3001
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Cheung, R.
45525b9d-cadc-486b-be31-ffc764a9b93e
Hassan, M.
3cfcf847-b6e9-438f-9576-515570671ea5
Harris, A.J.
047d22e4-3d2a-474b-bd46-6fff1762610a
Burdess, J.S.
c1d7049e-8ffb-4622-a3db-aeabe5d284a7
Mehregany, M.
65417051-ed59-4b48-a84a-1e4a5880ca27
November 2003
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Cheung, R.
45525b9d-cadc-486b-be31-ffc764a9b93e
Hassan, M.
3cfcf847-b6e9-438f-9576-515570671ea5
Harris, A.J.
047d22e4-3d2a-474b-bd46-6fff1762610a
Burdess, J.S.
c1d7049e-8ffb-4622-a3db-aeabe5d284a7
Mehregany, M.
65417051-ed59-4b48-a84a-1e4a5880ca27
Jiang, Liudi, Cheung, R., Hassan, M., Harris, A.J., Burdess, J.S. and Mehregany, M.
(2003)
Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 21 (6), .
(doi:10.1116/1.1627804).
Abstract
A simple one-step inductively coupled plasma etching technique has been developed for the fabrication of SiC resonant beam structures. Straight cantilever and bridge devices have been made successfully. The structures have been actuated and resonant frequencies ranging from ~120 kHz to ~5 MHz have been measured. Comparison of the theoretically simulated and experimentally measured resonant frequencies shows the presence of significant tensile stress in bridge structures while the cantilever beams are free of stress. The degree of the tension in the bridge structures has been found to be independent of the bridge length.
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Published date: November 2003
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Local EPrints ID: 23545
URI: http://eprints.soton.ac.uk/id/eprint/23545
ISSN: 0734-211X
PURE UUID: 8dea1eda-38b2-4832-9df0-af785326e64c
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Date deposited: 24 Mar 2006
Last modified: 16 Mar 2024 03:47
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Contributors
Author:
R. Cheung
Author:
M. Hassan
Author:
A.J. Harris
Author:
J.S. Burdess
Author:
M. Mehregany
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