The University of Southampton
University of Southampton Institutional Repository

Effect of reactive ion etching on amorphous carbon nitride films

Effect of reactive ion etching on amorphous carbon nitride films
Effect of reactive ion etching on amorphous carbon nitride films
Amorphous carbon nitride (a-C : N) films have been deposited by reactive direct current magnetron sputtering of graphite using N2 as the sputtering gas. In order to study the effects of dry etching on the deposited films, post-treatment of the films has been performed by reactive ion etching in an argon plasma and an oxygen plasma, respectively. Fourier transform infrared (FTIR) spectroscopy and x-ray photoelectron spectroscopy (XPS) have been used to study the chemical bonding structures in the films. We have found that although the FTIR results are very similar in all the samples, by comparing the XPS results from all the samples the relative ratio of the ?-C3N4-like phase over the graphite-like carbon-nitrogen phase in the films increased significantly after oxygen bombardment. This indicates that an oxygen plasma works effectively as an etchant of the graphite-like phase in a-C : N films. This process is conducive to the production of CN films that have a higher concentration of the ?-C3N4-like phase.
carbon nitride, plasma etching, ftir, xps
0142-2421
728-731
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fitzgerald, A. G.
fb51393e-401d-4216-acf9-a8759a4e48d8
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Gundlach, A.M.
bd3cd1a8-6277-454f-aae4-1b1779ea62a7
Cheung, R.
45525b9d-cadc-486b-be31-ffc764a9b93e
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fitzgerald, A. G.
fb51393e-401d-4216-acf9-a8759a4e48d8
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Gundlach, A.M.
bd3cd1a8-6277-454f-aae4-1b1779ea62a7
Cheung, R.
45525b9d-cadc-486b-be31-ffc764a9b93e

Jiang, Liudi, Fitzgerald, A. G., Rose, M.J., Gundlach, A.M. and Cheung, R. (2002) Effect of reactive ion etching on amorphous carbon nitride films. Surface and Interface Analysis, 34 (1), 728-731. (doi:10.1002/sia.1398).

Record type: Article

Abstract

Amorphous carbon nitride (a-C : N) films have been deposited by reactive direct current magnetron sputtering of graphite using N2 as the sputtering gas. In order to study the effects of dry etching on the deposited films, post-treatment of the films has been performed by reactive ion etching in an argon plasma and an oxygen plasma, respectively. Fourier transform infrared (FTIR) spectroscopy and x-ray photoelectron spectroscopy (XPS) have been used to study the chemical bonding structures in the films. We have found that although the FTIR results are very similar in all the samples, by comparing the XPS results from all the samples the relative ratio of the ?-C3N4-like phase over the graphite-like carbon-nitrogen phase in the films increased significantly after oxygen bombardment. This indicates that an oxygen plasma works effectively as an etchant of the graphite-like phase in a-C : N films. This process is conducive to the production of CN films that have a higher concentration of the ?-C3N4-like phase.

Full text not available from this repository.

More information

Published date: 2002
Keywords: carbon nitride, plasma etching, ftir, xps

Identifiers

Local EPrints ID: 23550
URI: http://eprints.soton.ac.uk/id/eprint/23550
ISSN: 0142-2421
PURE UUID: 8dd26986-b755-4897-8526-26c2fe43f1f9
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 28 Mar 2006
Last modified: 07 Oct 2020 01:51

Export record

Altmetrics

Contributors

Author: Liudi Jiang ORCID iD
Author: A. G. Fitzgerald
Author: M.J. Rose
Author: A.M. Gundlach
Author: R. Cheung

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×