Microstructural studies of copper incorporated amorphous carbon nitride films


Jiang, Liudi, Fitzgerald, A.G. and Rose, M.J. (2002) Microstructural studies of copper incorporated amorphous carbon nitride films Physica Status Solidi A-Applied Research, 189, (1), pp. 203-207. (doi:10.1002/1521-396X(200201)189:1<203::AID-PSSA203>3.0.CO;2-D).

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Description/Abstract

The effects of the incorporation of copper on the microstructure of amorphous carbon nitride films has been studied. Copper incorporated amorphous carbon nitride films (a-C : N : Cu) with different copper concentrations have been prepared by a magnetron co-sputtering technique. Both X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FTIR) have been used to characterise the bonding structures in the films. It is found that the N/(N+C) atomic ratio increases due to the incorporation of copper. The results also show that copper incorporation promotes formation of the sp3-bonded carbon nitrogen phase. The diamond nucleation in a-C : N : Cu films, which is determined from the observation of two-phonon diamond absorption FTIR bands, has been ascribed to the favorable formation of the sp3-bonded carbon nitrogen phase in the a-C : N : Cu films.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1002/1521-396X(200201)189:1<203::AID-PSSA203>3.0.CO;2-D
ISSNs: 0031-8965 (print)
Keywords: 61.43.Dq, 68.55.Nq, S7.14
Subjects:
ePrint ID: 23551
Date :
Date Event
2002Published
Date Deposited: 28 Mar 2006
Last Modified: 16 Apr 2017 22:44
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/23551

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