Jiang, Liudi, Fitzgerald, A.G. and Rose, M.J.
Microstructural studies of copper incorporated amorphous carbon nitride films
Physica Status Solidi A-Applied Research, 189, (1), . (doi:10.1002/1521-396X(200201)189:1<203::AID-PSSA203>3.0.CO;2-D).
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The effects of the incorporation of copper on the microstructure of amorphous carbon nitride films has been studied. Copper incorporated amorphous carbon nitride films (a-C : N : Cu) with different copper concentrations have been prepared by a magnetron co-sputtering technique. Both X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FTIR) have been used to characterise the bonding structures in the films. It is found that the N/(N+C) atomic ratio increases due to the incorporation of copper. The results also show that copper incorporation promotes formation of the sp3-bonded carbon nitrogen phase. The diamond nucleation in a-C : N : Cu films, which is determined from the observation of two-phonon diamond absorption FTIR bands, has been ascribed to the favorable formation of the sp3-bonded carbon nitrogen phase in the a-C : N : Cu films.
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