The University of Southampton
University of Southampton Institutional Repository

Microstructural properties of amorphous carbon nitride films synthesized by dc magnetron sputtering.

Fitzgerald, A.G., Jiang, Liudi, Rose, M.J. and Dines, T.J. (2001) Microstructural properties of amorphous carbon nitride films synthesized by dc magnetron sputtering. Applied Surface Science, 175-176, pp. 525-530. (doi:10.1016/S0169-4332(01)00107-6).

Record type: Article


Amorphous carbon nitride (a-C:N) films have been prepared on silicon(1 0 0) substrates by direct current magnetron sputtering of graphite using a gaseous mixture of Ar and N2. Raman spectra have shown that these a-C:N films have a graphitic structure. The incorporation of nitrogen in the films has been confirmed by Fourier transform infrared (FTIR) spectroscopy. Graphitic and disordered sp2-bonded carbon which are present in Raman spectra and are normally forbidden (not observed) in FTIR become infrared active in our films as the symmetry of the hexagonal carbon rings is broken by nitrogen incorporation. X-ray photoelectron spectroscopy has been used to study the type of chemical bonding in these a-C:N films. The C 1s and N 1s X-ray photoelectron peaks have been deconvoluted and studied. We have found that for the C6-point triple bond; length half of m-dashN and C=N components of the C 1s and N 1s photoelectron peaks, there is a maximum peak intensity ratio of C6-point triple bond; length half of m-dashN:C=N in the films deposited when the gaseous mixture contains 35% N2 in the sputter gas.

Full text not available from this repository.

More information

Published date: 2001
Keywords: amorphous carbon nitride, microstructure, XPS


Local EPrints ID: 23556
ISSN: 0169-4332
PURE UUID: a4551ac4-4f5a-449b-bfed-3f8a62382500
ORCID for Liudi Jiang: ORCID iD

Catalogue record

Date deposited: 28 Mar 2006
Last modified: 17 Jul 2017 16:17

Export record



Author: A.G. Fitzgerald
Author: Liudi Jiang ORCID iD
Author: M.J. Rose
Author: T.J. Dines

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.