Variation of bonding structure near the surface of carbon nitride films
Variation of bonding structure near the surface of carbon nitride films
Amorphous carbon nitride (a-C:N) films were deposited by reactive direct current magnetron sputtering of graphite using a gaseous mixture of Ar and N2. X-ray photo electron spectroscopy analysis (XPS) showed that there is an optimum volume ratio of nitrogen:argon in the sputter gas that results in a maximum content of incorporated nitrogen in the films. By using different take-off angles in XPS experiments, the variation gradient of bonding structure near the surface of a-C:N films has also been studied. In the surface layer of the a-C:N films, it was found that some of the initially formed ?-C3N4-like phase transforms to a graphite-like carbon–nitrogen phase. This structural change is driven by the nitrogen in the sputter gas during deposition.
carbon nitride, xps, take-off angle
340-344
Jiang, L.
d735cea7-11a5-464c-92fe-9f04b5f22a9d
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
2000
Jiang, L.
d735cea7-11a5-464c-92fe-9f04b5f22a9d
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Jiang, L., Fitzgerald, A.G. and Rose, M.J.
(2000)
Variation of bonding structure near the surface of carbon nitride films.
Applied Surface Science, 158 (3-4), .
(doi:10.1016/S0169-4332(00)00028-3).
Abstract
Amorphous carbon nitride (a-C:N) films were deposited by reactive direct current magnetron sputtering of graphite using a gaseous mixture of Ar and N2. X-ray photo electron spectroscopy analysis (XPS) showed that there is an optimum volume ratio of nitrogen:argon in the sputter gas that results in a maximum content of incorporated nitrogen in the films. By using different take-off angles in XPS experiments, the variation gradient of bonding structure near the surface of a-C:N films has also been studied. In the surface layer of the a-C:N films, it was found that some of the initially formed ?-C3N4-like phase transforms to a graphite-like carbon–nitrogen phase. This structural change is driven by the nitrogen in the sputter gas during deposition.
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Published date: 2000
Keywords:
carbon nitride, xps, take-off angle
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Local EPrints ID: 23559
URI: http://eprints.soton.ac.uk/id/eprint/23559
ISSN: 0169-4332
PURE UUID: ebd6a4f6-2501-4882-9ffe-8d13fa3595d1
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Date deposited: 07 Feb 2007
Last modified: 15 Mar 2024 06:48
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Author:
L. Jiang
Author:
A.G. Fitzgerald
Author:
M.J. Rose
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