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Cubic boron nitride films prepared with different deposition times

Cubic boron nitride films prepared with different deposition times
Cubic boron nitride films prepared with different deposition times
Since the physicochemical properties of cubic BN (c-BN) makes it a very useful material for various industrial and technological applications, cubic boron nitride films have aroused much attention in recent years. In this paper, c-BN films have been prepared by tuned substrate rf magnetron sputtering with different deposition time, which correspond to different growth stages of the BN films. Fourier Transform Infrared Absorption spectroscopy, X-ray Photoelectron Spectroscopy and Atomic Force Microscopy (AFM) have been used to characterize the films. We have found a change of composition and microstructure of the films with different deposition times. AFM images of thicker films showed that there are two BN layers on the substrate and nucleation lines were observed on the lower BN layer of the film. We believe that the thickness difference between the edge and the center of the c-BN sheets of the film, which was also observed in the AFM profile, gives some information about the growth mechanism of c-BN films.
0819437298
578-581
Jiang, Luidi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Lousa, A.
97add33d-9828-4945-9db9-886eca569443
Gimeno, S.
044dfb97-ffc6-4922-ab28-1fc89844f063
Chu, Junhao
9e912314-2e77-40b2-a5b4-60604039e4b2
Liu, Pulin
a5a8b1b9-18ef-4b55-9a81-2e45c8f83c7c
Chang, Yong
b6b13d58-1c42-49be-9890-e807e067670d
Jiang, Luidi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Lousa, A.
97add33d-9828-4945-9db9-886eca569443
Gimeno, S.
044dfb97-ffc6-4922-ab28-1fc89844f063
Chu, Junhao
9e912314-2e77-40b2-a5b4-60604039e4b2
Liu, Pulin
a5a8b1b9-18ef-4b55-9a81-2e45c8f83c7c
Chang, Yong
b6b13d58-1c42-49be-9890-e807e067670d

Jiang, Luidi, Fitzgerald, A.G., Rose, M.J., Lousa, A. and Gimeno, S. (2000) Cubic boron nitride films prepared with different deposition times. Chu, Junhao, Liu, Pulin and Chang, Yong (eds.) 4th International Conference on Thin Film Physics and Applications, Shanghai, China. 08 - 11 May 2000. pp. 578-581 . (doi:10.1117/12.408326).

Record type: Conference or Workshop Item (Other)

Abstract

Since the physicochemical properties of cubic BN (c-BN) makes it a very useful material for various industrial and technological applications, cubic boron nitride films have aroused much attention in recent years. In this paper, c-BN films have been prepared by tuned substrate rf magnetron sputtering with different deposition time, which correspond to different growth stages of the BN films. Fourier Transform Infrared Absorption spectroscopy, X-ray Photoelectron Spectroscopy and Atomic Force Microscopy (AFM) have been used to characterize the films. We have found a change of composition and microstructure of the films with different deposition times. AFM images of thicker films showed that there are two BN layers on the substrate and nucleation lines were observed on the lower BN layer of the film. We believe that the thickness difference between the edge and the center of the c-BN sheets of the film, which was also observed in the AFM profile, gives some information about the growth mechanism of c-BN films.

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More information

Published date: 2000
Venue - Dates: 4th International Conference on Thin Film Physics and Applications, Shanghai, China, 2000-05-08 - 2000-05-11

Identifiers

Local EPrints ID: 23561
URI: http://eprints.soton.ac.uk/id/eprint/23561
ISBN: 0819437298
PURE UUID: 1db60ee6-8978-4a3e-8fbf-5ee28bcb0980
ORCID for Luidi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 22 Feb 2007
Last modified: 16 Mar 2024 03:47

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Contributors

Author: Luidi Jiang ORCID iD
Author: A.G. Fitzgerald
Author: M.J. Rose
Author: A. Lousa
Author: S. Gimeno
Editor: Junhao Chu
Editor: Pulin Liu
Editor: Yong Chang

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