A multilayer thick-film PZT actuator for MEMs applications

Harris, N. R., Hill, M., Torah, R., Townsend, R., Beeby, S. P., White, N. M. and Ding, J. (2005) A multilayer thick-film PZT actuator for MEMs applications At Eurosensors XIX. 01 Jan 2005.


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This paper describes a technique for replacing the traditional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices.

Item Type: Conference or Workshop Item (Paper)
Additional Information: On CD
Venue - Dates: Eurosensors XIX, 2005-01-01 - 2005-01-01
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Keywords: ultrasonic, MEMS, thick-film
ePrint ID: 23879
Date :
Date Event
Date Deposited: 30 Mar 2006
Last Modified: 16 Apr 2017 22:43
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/23879

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