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A multilayer thick-film PZT actuator for MEMs applications

A multilayer thick-film PZT actuator for MEMs applications
A multilayer thick-film PZT actuator for MEMs applications
This paper describes a technique for replacing the traditional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices.
ultrasonic, MEMS, thick-film
Harris, N. R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Torah, R.
7147b47b-db01-4124-95dc-90d6a9842688
Townsend, R.
0452b21c-a758-4d4a-925b-1511d9296d62
Beeby, S. P.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J.
3c8f054d-a84e-4f16-9767-c76364a1b5a2
Harris, N. R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Torah, R.
7147b47b-db01-4124-95dc-90d6a9842688
Townsend, R.
0452b21c-a758-4d4a-925b-1511d9296d62
Beeby, S. P.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J.
3c8f054d-a84e-4f16-9767-c76364a1b5a2

Harris, N. R., Hill, M., Torah, R., Townsend, R., Beeby, S. P., White, N. M. and Ding, J. (2005) A multilayer thick-film PZT actuator for MEMs applications. Eurosensors XIX, Barcelona, Spain, Barcelona, Spain. 11 - 14 Sep 2005.

Record type: Conference or Workshop Item (Paper)

Abstract

This paper describes a technique for replacing the traditional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices.

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More information

Published date: 2005
Additional Information: On CD
Venue - Dates: Eurosensors XIX, Barcelona, Spain, Barcelona, Spain, 2005-09-11 - 2005-09-14
Keywords: ultrasonic, MEMS, thick-film
Organisations: Engineering Sciences
Learn more about Engineering Sciences research

Identifiers

Local EPrints ID: 23879
URI: http://eprints.soton.ac.uk/id/eprint/23879
PURE UUID: 313f5092-96b1-4ece-92bc-0893f2923fab
ORCID for N. R. Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448
ORCID for R. Torah: ORCID iD orcid.org/0000-0002-5598-2860
ORCID for S. P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N. M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 30 Mar 2006
Last modified: 06 Mar 2024 02:41

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Contributors

Author: N. R. Harris ORCID iD
Author: M. Hill ORCID iD
Author: R. Torah ORCID iD
Author: R. Townsend
Author: S. P. Beeby ORCID iD
Author: N. M. White ORCID iD
Author: J. Ding

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