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A multilayer thick-film PZT actuator for MEMs applications

Harris, N. R., Hill, M., Torah, R., Townsend, R., Beeby, S. P., White, N. M. and Ding, J. (2005) A multilayer thick-film PZT actuator for MEMs applications At Eurosensors XIX. 01 Jan 2005.

Record type: Conference or Workshop Item (Paper)

Abstract

This paper describes a technique for replacing the traditional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices.

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More information

Published date: 2005
Additional Information: On CD
Venue - Dates: Eurosensors XIX, 2005-01-01 - 2005-01-01
Keywords: ultrasonic, MEMS, thick-film
Organisations: Engineering Sciences

Identifiers

Local EPrints ID: 23879
URI: http://eprints.soton.ac.uk/id/eprint/23879
PURE UUID: 313f5092-96b1-4ece-92bc-0893f2923fab
ORCID for N. R. Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448
ORCID for S. P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N. M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 30 Mar 2006
Last modified: 17 Jul 2017 16:16

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Contributors

Author: N. R. Harris ORCID iD
Author: M. Hill ORCID iD
Author: R. Torah
Author: R. Townsend
Author: S. P. Beeby ORCID iD
Author: N. M. White ORCID iD
Author: J. Ding

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