Harris, N. R., Hill, M., Torah, R., Townsend, R., Beeby, S. P., White, N. M. and Ding, J.
A multilayer thick-film PZT actuator for MEMs applications
At Eurosensors XIX.
01 Jan 2005.
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This paper describes a technique for replacing the traditional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed
structures to deliver powers equivalent to bulk devices.
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