Characterisation of the effectiveness of carbon incorporation in SiGe for the elimination of parasitic energy barriers in SiGe HBT's
Characterisation of the effectiveness of carbon incorporation in SiGe for the elimination of parasitic energy barriers in SiGe HBT's
An electrical method is applied to SiGe and SiGeC HBTs to extract the bandgap narrowing in the base layer and to characterise the presence of parasitic energy barriers in the conduction band, arising from transient enhanced boron diffusion from the SiGe layer. It is shown that a background carbon concentration with the base of approximately 1E20cm-3 eliminates parasitic energy barriers at the C/B junction and hence shows that transient enhanced diffusion of boron from the base has been completely suppressed.
116-118
Anteney, I.M.
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Lippert, G.
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Ashburn, P.
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Osten, H.J.
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Heinemann, B.
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Parker, G.J.
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Knoll, D.
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1999
Anteney, I.M.
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Lippert, G.
c32982f9-eea8-4d3e-8d89-2963ed79ea04
Ashburn, P.
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Osten, H.J.
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Heinemann, B.
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Parker, G.J.
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Knoll, D.
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Anteney, I.M., Lippert, G., Ashburn, P., Osten, H.J., Heinemann, B., Parker, G.J. and Knoll, D.
(1999)
Characterisation of the effectiveness of carbon incorporation in SiGe for the elimination of parasitic energy barriers in SiGe HBT's.
IEEE Electron Device Letters, 20, .
Abstract
An electrical method is applied to SiGe and SiGeC HBTs to extract the bandgap narrowing in the base layer and to characterise the presence of parasitic energy barriers in the conduction band, arising from transient enhanced boron diffusion from the SiGe layer. It is shown that a background carbon concentration with the base of approximately 1E20cm-3 eliminates parasitic energy barriers at the C/B junction and hence shows that transient enhanced diffusion of boron from the base has been completely suppressed.
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1999_Anteney_EDL_diffusion_in_SiGeC.pdf
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Published date: 1999
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 250679
URI: http://eprints.soton.ac.uk/id/eprint/250679
ISSN: 0741-3106
PURE UUID: 0e9d7e6e-eb9f-4584-9c19-39c9d0ee1b18
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Date deposited: 06 Jan 2004
Last modified: 14 Mar 2024 04:53
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Contributors
Author:
I.M. Anteney
Author:
G. Lippert
Author:
H.J. Osten
Author:
B. Heinemann
Author:
G.J. Parker
Author:
D. Knoll
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