The University of Southampton
University of Southampton Institutional Repository

Increased current gain and reduced emitter resistance in SiGe HBTs by fluorine or chlorine implantation into a polysilicon emitter contact

Increased current gain and reduced emitter resistance in SiGe HBTs by fluorine or chlorine implantation into a polysilicon emitter contact
Increased current gain and reduced emitter resistance in SiGe HBTs by fluorine or chlorine implantation into a polysilicon emitter contact
Schiz, J
d29b4f9e-f87d-445a-962b-db8de79f45a1
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Marsh, C D
b5482357-2e75-49f8-8217-72e1fde37c9f
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Booker, G R
1c5cd067-0dc6-4cd7-9e2c-9adf8ae291e9
Schiz, J
d29b4f9e-f87d-445a-962b-db8de79f45a1
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Marsh, C D
b5482357-2e75-49f8-8217-72e1fde37c9f
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Booker, G R
1c5cd067-0dc6-4cd7-9e2c-9adf8ae291e9

Schiz, J, Moiseiwitsch, N E, Marsh, C D, Ashburn, Peter and Booker, G R (1996) Increased current gain and reduced emitter resistance in SiGe HBTs by fluorine or chlorine implantation into a polysilicon emitter contact.

Record type: Other

Full text not available from this repository.

More information

Published date: 1996
Additional Information: Organisation: Proc European Solid State Device Research Conference
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 250695
URI: https://eprints.soton.ac.uk/id/eprint/250695
PURE UUID: 9f2432a6-d046-4046-bca3-e5b1c0651576

Catalogue record

Date deposited: 25 Aug 1999
Last modified: 16 Jul 2019 23:11

Export record

Contributors

Author: J Schiz
Author: N E Moiseiwitsch
Author: C D Marsh
Author: Peter Ashburn
Author: G R Booker

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×