Rahim, A I Abdul, Marsh, C D, Ashburn, P and Booker, G R (1997) Improved control of polysilicon emitter interfacial oxide using a UHV-compatible cluster tool. Proceedings of 5th IEEE Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications. pp. 232-236 .
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Published date: 1997
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Proceedings of 5th IEEE Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, 1997-01-01
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 250923
URI: http://eprints.soton.ac.uk/id/eprint/250923
ISBN: 0-7803-4135-X
PURE UUID: 225cb7cc-456d-4253-a582-b2745aac2104
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Date deposited: 01 Oct 1999
Last modified: 10 Dec 2021 20:19
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