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Improved control of polysilicon emitter interfacial oxide using a UHV-compatible cluster tool

Rahim, A I Abdul, Marsh, C D, Ashburn, P and Booker, G R (1997) Improved control of polysilicon emitter interfacial oxide using a UHV-compatible cluster tool At Proceedings of 5th IEEE Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications. , pp. 232-236.

Record type: Conference or Workshop Item (Other)

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Published date: 1997
Venue - Dates: Proceedings of 5th IEEE Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, 1997-01-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 250923
URI: http://eprints.soton.ac.uk/id/eprint/250923
ISBN: 0-7803-4135-X
PURE UUID: 225cb7cc-456d-4253-a582-b2745aac2104

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Date deposited: 01 Oct 1999
Last modified: 18 Jul 2017 10:13

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Contributors

Author: A I Abdul Rahim
Author: C D Marsh
Author: P Ashburn
Author: G R Booker

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