Improved control of polysilicon emitter interfacial oxide using a UHV-compatible cluster tool


Rahim, A I Abdul, Marsh, C D, Ashburn, P and Booker, G R (1997) Improved control of polysilicon emitter interfacial oxide using a UHV-compatible cluster tool At Proceedings of 5th IEEE Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications. , pp. 232-236.

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Item Type: Conference or Workshop Item (Other)
Venue - Dates: Proceedings of 5th IEEE Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, 1997-01-01
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 250923
Date :
Date Event
1997Published
Date Deposited: 01 Oct 1999
Last Modified: 17 Apr 2017 23:47
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/250923

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