The effects of fluorine on the epitaxial regrowth of arsenic doped amorphous silicon and polysilicon and of chlorine on the epitaxial regrowth of arsenic doped polysilicon
The effects of fluorine on the epitaxial regrowth of arsenic doped amorphous silicon and polysilicon and of chlorine on the epitaxial regrowth of arsenic doped polysilicon
0-7503-0464-2
411-414
Marsh, C D
b5482357-2e75-49f8-8217-72e1fde37c9f
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Booker, G R
1c5cd067-0dc6-4cd7-9e2c-9adf8ae291e9
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
1997
Marsh, C D
b5482357-2e75-49f8-8217-72e1fde37c9f
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Booker, G R
1c5cd067-0dc6-4cd7-9e2c-9adf8ae291e9
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Marsh, C D, Moiseiwitsch, N E, Booker, G R and Ashburn, P
(1997)
The effects of fluorine on the epitaxial regrowth of arsenic doped amorphous silicon and polysilicon and of chlorine on the epitaxial regrowth of arsenic doped polysilicon.
Proceedings of Microscopy of Semiconducting Materials Conference.
.
Record type:
Conference or Workshop Item
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Published date: 1997
Venue - Dates:
Proceedings of Microscopy of Semiconducting Materials Conference, 1997-01-01
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 250929
URI: http://eprints.soton.ac.uk/id/eprint/250929
ISBN: 0-7503-0464-2
PURE UUID: eef1243d-2a73-47d7-a6db-0cad3e316a75
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Date deposited: 01 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
C D Marsh
Author:
N E Moiseiwitsch
Author:
G R Booker
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