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The effects of fluorine on the epitaxial regrowth of arsenic doped amorphous silicon and polysilicon and of chlorine on the epitaxial regrowth of arsenic doped polysilicon

Record type: Conference or Workshop Item (Other)

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Citation

Marsh, C D, Moiseiwitsch, N E, Booker, G R and Ashburn, P (1997) The effects of fluorine on the epitaxial regrowth of arsenic doped amorphous silicon and polysilicon and of chlorine on the epitaxial regrowth of arsenic doped polysilicon At Proceedings of Microscopy of Semiconducting Materials Conference. , pp. 411-414.

More information

Published date: 1997
Venue - Dates: Proceedings of Microscopy of Semiconducting Materials Conference, 1997-01-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 250929
URI: http://eprints.soton.ac.uk/id/eprint/250929
ISBN: 0-7503-0464-2
PURE UUID: eef1243d-2a73-47d7-a6db-0cad3e316a75

Catalogue record

Date deposited: 01 Oct 1999
Last modified: 18 Jul 2017 10:13

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Contributors

Author: C D Marsh
Author: N E Moiseiwitsch
Author: G R Booker
Author: P Ashburn

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