The University of Southampton
University of Southampton Institutional Repository

Application of silane only selective epitaxy to the fabrication of fully self-aligned silicon bipolar transistors

Application of silane only selective epitaxy to the fabrication of fully self-aligned silicon bipolar transistors
Application of silane only selective epitaxy to the fabrication of fully self-aligned silicon bipolar transistors
795-798
Boussetta, H
541c4991-d5b3-4613-b1f8-0418067007f3
Gregory, H J
24f28e8b-5ed2-4418-ac3e-a0c8e77588d2
Bonar, J M
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Boussetta, H
541c4991-d5b3-4613-b1f8-0418067007f3
Gregory, H J
24f28e8b-5ed2-4418-ac3e-a0c8e77588d2
Bonar, J M
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d

Boussetta, H, Gregory, H J, Bonar, J M, Ashburn, P and Parker, G J (1996) Application of silane only selective epitaxy to the fabrication of fully self-aligned silicon bipolar transistors. Proceedings of European Solid State Device Research Conference. pp. 795-798 .

Record type: Conference or Workshop Item (Other)

This record has no associated files available for download.

More information

Published date: 1996
Venue - Dates: Proceedings of European Solid State Device Research Conference, 1996-01-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 250934
URI: http://eprints.soton.ac.uk/id/eprint/250934
PURE UUID: f567cfc5-28f7-44ec-adff-b6f670af0cd0

Catalogue record

Date deposited: 01 Oct 1999
Last modified: 08 Jan 2022 14:39

Export record

Contributors

Author: H Boussetta
Author: H J Gregory
Author: J M Bonar
Author: P Ashburn
Author: G J Parker

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×