Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation
Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
1994
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Moiseiwitsch, N E and Ashburn, P
(1994)
Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation.
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Published date: 1994
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 250948
URI: http://eprints.soton.ac.uk/id/eprint/250948
PURE UUID: 2c85360c-6378-4199-95db-0dd4a5f801c5
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Date deposited: 04 Oct 1999
Last modified: 10 Dec 2021 20:19
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Author:
N E Moiseiwitsch
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