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Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation

Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation
Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Moiseiwitsch, N E
3cca82f7-300c-4ef9-9298-f68d784d3735
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038

Moiseiwitsch, N E and Ashburn, P (1994) Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation.

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More information

Published date: 1994
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 250948
URI: http://eprints.soton.ac.uk/id/eprint/250948
PURE UUID: 2c85360c-6378-4199-95db-0dd4a5f801c5

Catalogue record

Date deposited: 04 Oct 1999
Last modified: 10 Dec 2021 20:19

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Contributors

Author: N E Moiseiwitsch
Author: P Ashburn

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