Optimisation of BF2 implanted pnp polysilicon emitter bipolar transistors using rapid thermal annealing

Moiseiwitsch, N E and Ashburn, P (1993) Optimisation of BF2 implanted pnp polysilicon emitter bipolar transistors using rapid thermal annealing.

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Published date: 1993

Additional Information: Organisation: ESSDERC

Organisations: Nanoelectronics and Nanotechnology

Local EPrints ID: 250962

URI: http://eprints.soton.ac.uk/id/eprint/250962

PURE UUID: a844116a-8e81-4ba0-a0c6-530834bcca0d

Date deposited: 05 Oct 1999

Last modified: 03 Jan 2024 16:13

Author: N E Moiseiwitsch

Author: P Ashburn

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