Hart, M J and Evans, A G R (1985) A Scanning Electron Beam Annealer with Electrostatic Deflection Systems.
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Published date: 1985
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 250991
URI: http://eprints.soton.ac.uk/id/eprint/250991
PURE UUID: 8c497297-c32f-4d78-a2ad-e4eebddbec8b
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Date deposited: 08 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
M J Hart
Author:
A G R Evans
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