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A Scanning Electron Beam Annealer with Electrostatic Deflection Systems

Hart, M J and Evans, A G R (1985) A Scanning Electron Beam Annealer with Electrostatic Deflection Systems

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Published date: 1985
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 250991
URI: http://eprints.soton.ac.uk/id/eprint/250991
PURE UUID: 8c497297-c32f-4d78-a2ad-e4eebddbec8b

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Date deposited: 08 Oct 1999
Last modified: 18 Jul 2017 10:13

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Contributors

Author: M J Hart
Author: A G R Evans

University divisions

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