French, P J and Evans, A G R (1986) The Effect of Deposition of Temperature on LPCVD Polysilicon.
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Published date: 1986
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 250996
URI: http://eprints.soton.ac.uk/id/eprint/250996
PURE UUID: b5773b3b-7593-4835-9055-71e47a94a9b1
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Date deposited: 08 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
P J French
Author:
A G R Evans
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