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The Effect of Deposition of Temperature on LPCVD Polysilicon

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Citation

French, P J and Evans, A G R (1986) The Effect of Deposition of Temperature on LPCVD Polysilicon

More information

Published date: 1986
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 250996
URI: http://eprints.soton.ac.uk/id/eprint/250996
PURE UUID: b5773b3b-7593-4835-9055-71e47a94a9b1

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Date deposited: 08 Oct 1999
Last modified: 18 Jul 2017 10:13

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Contributors

Author: P J French
Author: A G R Evans

University divisions

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