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A Dual Pulse Scanning Electron-Beam annealer

A Dual Pulse Scanning Electron-Beam annealer
A Dual Pulse Scanning Electron-Beam annealer
Hart, M J
e4833057-eb19-44aa-9b1c-c86de054a920
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Bartlett, N K
cf7fa288-951f-490a-b478-b30a4936c3fa
Hart, M J
e4833057-eb19-44aa-9b1c-c86de054a920
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Bartlett, N K
cf7fa288-951f-490a-b478-b30a4936c3fa

Hart, M J, Evans, A G R and Bartlett, N K (1987) A Dual Pulse Scanning Electron-Beam annealer.

Record type: Other

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More information

Published date: 1987
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251003
URI: https://eprints.soton.ac.uk/id/eprint/251003
PURE UUID: eda790ad-be37-4a9e-a4ec-bd3d4643866f

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 18 Jul 2017 10:13

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Contributors

Author: M J Hart
Author: A G R Evans
Author: N K Bartlett

University divisions

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