Farooqui, M M and Evans, A G R (1987) A polysilicon diaphragm based pressure sensor technology.
Record type:
Other
This record has no associated files available for download.
More information
Published date: 1987
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251007
URI: http://eprints.soton.ac.uk/id/eprint/251007
PURE UUID: d184635d-13c3-4126-acc9-5eabc2ca5b1f
Catalogue record
Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
Export record
Contributors
Author:
M M Farooqui
Author:
A G R Evans
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.