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A polysilicon diaphragm based pressure sensor technology

A polysilicon diaphragm based pressure sensor technology
A polysilicon diaphragm based pressure sensor technology
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Farooqui, M M and Evans, A G R (1987) A polysilicon diaphragm based pressure sensor technology.

Record type: Other

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More information

Published date: 1987
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251007
URI: https://eprints.soton.ac.uk/id/eprint/251007
PURE UUID: d184635d-13c3-4126-acc9-5eabc2ca5b1f

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 18 Jul 2017 10:13

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