Polysilicon strain sensors using shear piezoresistance
Polysilicon strain sensors using shear piezoresistance
French, P J
96a038f4-a5bb-459f-b608-a5b3cf32cd32
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
1988
French, P J
96a038f4-a5bb-459f-b608-a5b3cf32cd32
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
French, P J and Evans, A G R
(1988)
Polysilicon strain sensors using shear piezoresistance.
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Published date: 1988
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251008
URI: http://eprints.soton.ac.uk/id/eprint/251008
PURE UUID: 65cde98d-91eb-411b-98b4-39ff79c7bd2e
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Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
P J French
Author:
A G R Evans
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