Murray, D C, Evans, A G R, Atrip, J L and Carter, J C (1990) The effects of RTA on CMOS devices.
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More information
Published date: 1990
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251024
URI: http://eprints.soton.ac.uk/id/eprint/251024
PURE UUID: d50620a9-dc21-4764-a283-67efe1983673
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Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
D C Murray
Author:
A G R Evans
Author:
J L Atrip
Author:
J C Carter
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