The effects of RTA on CMOS devices


Murray, D C, Evans, A G R, Atrip, J L and Carter, J C (1990) The effects of RTA on CMOS devices

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 251024
Date :
Date Event
1990Published
Date Deposited: 11 Oct 1999
Last Modified: 17 Apr 2017 23:46
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251024

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