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Epitaxial growth of n+ and p+ polysilicon layers given single and double diffusions

Record type: Other

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Citation

Williams, J D and Ashburn, P (1992) Epitaxial growth of n+ and p+ polysilicon layers given single and double diffusions

More information

Published date: 1992
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251044
URI: http://eprints.soton.ac.uk/id/eprint/251044
PURE UUID: 0e162d60-b9b0-4d3c-acd8-ceb8ecf31a94

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 18 Jul 2017 10:13

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Contributors

Author: J D Williams
Author: P Ashburn

University divisions


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