Williams, J D and Ashburn, P (1992) Epitaxial growth of n+ and p+ polysilicon layers given single and double diffusions.
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Published date: 1992
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 251044
URI: http://eprints.soton.ac.uk/id/eprint/251044
PURE UUID: 0e162d60-b9b0-4d3c-acd8-ceb8ecf31a94
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Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
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