Anomalous Electrical deactivation of low concentration rapid thermally annealed arsenic implanted silicon


Altrip, J L and Evans, A G R (1992) Anomalous Electrical deactivation of low concentration rapid thermally annealed arsenic implanted silicon

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Item Type: Other
Additional Information: Proceedings of 22 European Solid State Device Research Conference published in Microelectronic Engineering.
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 251052
Date :
Date Event
1992Published
Date Deposited: 11 Oct 1999
Last Modified: 17 Apr 2017 23:45
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251052

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