Altrip, J L and Evans, A G R (1992) Anomalous Electrical deactivation of low concentration rapid thermally annealed arsenic implanted silicon.
Record type:
Other
This record has no associated files available for download.
More information
Published date: 1992
Additional Information:
Proceedings of 22 European Solid State Device Research Conference published in Microelectronic Engineering.
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251052
URI: http://eprints.soton.ac.uk/id/eprint/251052
PURE UUID: fc6f8491-baa9-4f3c-bdf9-c4c5325979f8
Catalogue record
Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
Export record
Contributors
Author:
J L Altrip
Author:
A G R Evans
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.