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Anomalous Electrical deactivation of low concentration rapid thermally annealed arsenic implanted silicon

Record type: Other

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Citation

Altrip, J L and Evans, A G R (1992) Anomalous Electrical deactivation of low concentration rapid thermally annealed arsenic implanted silicon

More information

Published date: 1992
Additional Information: Proceedings of 22 European Solid State Device Research Conference published in Microelectronic Engineering.
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251052
URI: http://eprints.soton.ac.uk/id/eprint/251052
PURE UUID: fc6f8491-baa9-4f3c-bdf9-c4c5325979f8

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 18 Jul 2017 10:12

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Contributors

Author: J L Altrip
Author: A G R Evans

University divisions


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