Parker, Dr G J and Starbuck, C M K (1990) Selective silicon epitaxial growth by LPCVD using silane.
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Published date: June 1990
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251056
URI: http://eprints.soton.ac.uk/id/eprint/251056
PURE UUID: df988c52-c82e-47ac-ba6f-14e165bc455b
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Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
Dr G J Parker
Author:
C M K Starbuck
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