Farooqui, M M and Evans, A G R (1992) Microfabrication of submicron nozzles in silicon nitride.
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Published date: 1992
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251057
URI: http://eprints.soton.ac.uk/id/eprint/251057
PURE UUID: 6f9d783c-3b5e-4081-a5bf-6bb591fe52af
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Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
M M Farooqui
Author:
A G R Evans
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