Microfabrication of submicron nozzles in silicon nitride


Farooqui, M M and Evans, A G R (1992) Microfabrication of submicron nozzles in silicon nitride

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 251057
Date :
Date Event
1992Published
Date Deposited: 11 Oct 1999
Last Modified: 17 Apr 2017 23:46
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251057

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