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Microfabrication of submicron nozzles in silicon nitride

Microfabrication of submicron nozzles in silicon nitride
Microfabrication of submicron nozzles in silicon nitride
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Farooqui, M M and Evans, A G R (1992) Microfabrication of submicron nozzles in silicon nitride.

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More information

Published date: 1992
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251057
URI: http://eprints.soton.ac.uk/id/eprint/251057
PURE UUID: 6f9d783c-3b5e-4081-a5bf-6bb591fe52af

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19

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Contributors

Author: M M Farooqui
Author: A G R Evans

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