Carter, J.C., Evans, A.G.R. and Throngnumchai, K. (1993) Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality.
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Published date: 1993
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251059
URI: http://eprints.soton.ac.uk/id/eprint/251059
PURE UUID: b228b47b-da1d-4ed6-9578-9ba4f196b1c1
Catalogue record
Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
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Contributors
Author:
J.C. Carter
Author:
A.G.R. Evans
Author:
K. Throngnumchai
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