The University of Southampton
University of Southampton Institutional Repository

Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Carter, J C
6a4e2120-5d03-4621-9ebc-ba8901e40e7a
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Throngnumchai, K
d216a0ad-acb5-44cb-84be-53bf9f150253
Carter, J C
6a4e2120-5d03-4621-9ebc-ba8901e40e7a
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Throngnumchai, K
d216a0ad-acb5-44cb-84be-53bf9f150253

Carter, J C, Evans, A G R and Throngnumchai, K (1993) Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality.

Record type: Other

Full text not available from this repository.

More information

Published date: 1993
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251059
URI: https://eprints.soton.ac.uk/id/eprint/251059
PURE UUID: b228b47b-da1d-4ed6-9578-9ba4f196b1c1

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 18 Jul 2017 10:13

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×