Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality


Carter, J C, Evans, A G R and Throngnumchai, K (1993) Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Download

Full text not available from this repository.

Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 251059
Date :
Date Event
1993Published
Date Deposited: 11 Oct 1999
Last Modified: 17 Apr 2017 23:46
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251059

Actions (login required)

View Item View Item