Parker, Dr G J (1984) Silicon MBE and submicron lithography state of the art 1984 Canadian conference on VLSI.
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Published date: 1984
Additional Information:
Organisation: Edmonton, Canada 1984
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 251061
URI: http://eprints.soton.ac.uk/id/eprint/251061
PURE UUID: b9f31184-b05a-4a6d-9b98-b200e2e9513b
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Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19
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Author:
Dr G J Parker
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