Farooqui, M M and Evans, Alan G R (1993) Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process.
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Published date: 1993
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251154
URI: http://eprints.soton.ac.uk/id/eprint/251154
PURE UUID: 93d2a940-24d7-4887-aa1f-b0d87c23bac5
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Date deposited: 12 Oct 1999
Last modified: 10 Dec 2021 20:20
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Contributors
Author:
M M Farooqui
Author:
Alan G R Evans
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