Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process


Farooqui, M M and Evans, Alan G R (1993) Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 251154
Date :
Date Event
1993Published
Date Deposited: 12 Oct 1999
Last Modified: 17 Apr 2017 23:44
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251154

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