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Micromachined silicon sensors for atomic force microscopy

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Citation

Farooqui, M M, Evans, A G R, Stedman, M and Haycocks, J (1992) Micromachined silicon sensors for atomic force microscopy

More information

Published date: 1992
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251157
URI: http://eprints.soton.ac.uk/id/eprint/251157
PURE UUID: b680c9ed-e3da-4e49-aecf-e7b5c3312c97

Catalogue record

Date deposited: 12 Oct 1999
Last modified: 18 Jul 2017 10:11

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Contributors

Author: M M Farooqui
Author: A G R Evans
Author: M Stedman
Author: J Haycocks

University divisions

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