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Micromachined silicon sensors for atomic force microscopy

Farooqui, M M, Evans, A G R, Stedman, M and Haycocks, J (1992) Micromachined silicon sensors for atomic force microscopy

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Published date: 1992
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 251157
PURE UUID: b680c9ed-e3da-4e49-aecf-e7b5c3312c97

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Date deposited: 12 Oct 1999
Last modified: 18 Jul 2017 10:11

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Author: M M Farooqui
Author: A G R Evans
Author: M Stedman
Author: J Haycocks

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