Micromachined silicon sensors for atomic force microscopy


Farooqui, M M, Evans, A G R, Stedman, M and Haycocks, J (1992) Micromachined silicon sensors for atomic force microscopy

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 251157
Date :
Date Event
1992Published
Date Deposited: 12 Oct 1999
Last Modified: 17 Apr 2017 23:44
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251157

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