Su, Y, Evans, A G R and Brunnschweiler, A (1996) Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing.
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Published date: 1996
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251166
URI: http://eprints.soton.ac.uk/id/eprint/251166
PURE UUID: b57a6299-9d4e-4893-aeb0-80c5e124cf25
Catalogue record
Date deposited: 13 Oct 1999
Last modified: 07 Jan 2022 21:08
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Contributors
Author:
Y Su
Author:
A G R Evans
Author:
A Brunnschweiler
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