Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing


Su, Y, Evans, A G R and Brunnschweiler, A (1996) Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 251166
Date :
Date Event
1996Published
Date Deposited: 13 Oct 1999
Last Modified: 17 Apr 2017 23:44
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251166

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