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Coupled FEM simulation for the characterisation of the fluid flow within a micromachined antilever valve

Coupled FEM simulation for the characterisation of the fluid flow within a micromachined antilever valve
Coupled FEM simulation for the characterisation of the fluid flow within a micromachined antilever valve
Koch, M
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Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
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Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565

Koch, M, Evans, A G R and Brunnschweiler, A (1996) Coupled FEM simulation for the characterisation of the fluid flow within a micromachined antilever valve.

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More information

Published date: 1996
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251167
URI: http://eprints.soton.ac.uk/id/eprint/251167
PURE UUID: 9e822b40-c4f5-46d1-ab1f-317649046ed4

Catalogue record

Date deposited: 13 Oct 1999
Last modified: 10 Dec 2021 20:20

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Contributors

Author: M Koch
Author: A G R Evans
Author: A Brunnschweiler

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