Simulation and fabrication of micromachined cantilever valves
Simulation and fabrication of micromachined cantilever valves
This paper reports the fabrication and simulation of micromachined cantilever valves. The simulation is achieved by coupling the finite-element method (FEM) package ANSYS and the computational fluid dynamics (CFD) package FLOW3D. It is based on iterative runs for the deflection of the cantilever (ANSYS) and the fluid flow in the duct/cantilever area (FLOW3D). A macro programme controls the data flow between the simulators and the convergence of the simulation. With the coupled simulation, flow rates for cantilever valves at given pressures are calculated. These results are compared with micromachined cantilever valves fabricated by fusion bonding of a flap-containing wafer with a duct-containing water. For the release of the cantilever, toluene is used to avoid stiction while drying the chips. Agreement between measured and simulated flow rates is good and gives confidence in the use of this simulator for valve development.
756-759
Koch, M.
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
July 1997
Koch, M.
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Koch, M., Evans, A.G.R. and Brunnschweiler, A.
(1997)
Simulation and fabrication of micromachined cantilever valves.
Sensors and Actuators A: Physical, 62 (1-3), .
(doi:10.1016/S0924-4247(97)01577-X).
Abstract
This paper reports the fabrication and simulation of micromachined cantilever valves. The simulation is achieved by coupling the finite-element method (FEM) package ANSYS and the computational fluid dynamics (CFD) package FLOW3D. It is based on iterative runs for the deflection of the cantilever (ANSYS) and the fluid flow in the duct/cantilever area (FLOW3D). A macro programme controls the data flow between the simulators and the convergence of the simulation. With the coupled simulation, flow rates for cantilever valves at given pressures are calculated. These results are compared with micromachined cantilever valves fabricated by fusion bonding of a flap-containing wafer with a duct-containing water. For the release of the cantilever, toluene is used to avoid stiction while drying the chips. Agreement between measured and simulated flow rates is good and gives confidence in the use of this simulator for valve development.
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Published date: July 1997
Venue - Dates:
Eurosensors X, , Leuven, Belgium, 1996-09-08 - 1996-09-11
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251169
URI: http://eprints.soton.ac.uk/id/eprint/251169
ISSN: 0924-4247
PURE UUID: 259a2bf8-35c9-4f6d-9c23-43436061cb03
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Date deposited: 13 Oct 1999
Last modified: 20 Sep 2023 16:57
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Contributors
Author:
M. Koch
Author:
A.G.R. Evans
Author:
A. Brunnschweiler
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