Characterisation of micromachined cantilever valves
Characterisation of micromachined cantilever valves
Koch, M.
e40267ab-ad55-409c-9727-3dd53de47374
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
1997
Koch, M.
e40267ab-ad55-409c-9727-3dd53de47374
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Koch, M., Evans, A.G.R. and Brunnschweiler, A.
(1997)
Characterisation of micromachined cantilever valves.
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Published date: 1997
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251174
URI: http://eprints.soton.ac.uk/id/eprint/251174
PURE UUID: f9d3d0aa-0b44-4898-931f-86f3f4a18bc5
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Date deposited: 14 Oct 1999
Last modified: 10 Dec 2021 20:20
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Contributors
Author:
M. Koch
Author:
A.G.R. Evans
Author:
A. Brunnschweiler
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