Rotich, S.K., Smith, J.G., Evans, A.G.R. and Brunnschweiller, A. (1998) Photoresist parabolas for curved micromirrors.
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More information
Published date: 1998
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251184
URI: http://eprints.soton.ac.uk/id/eprint/251184
PURE UUID: b8f2cb77-bf7d-4f80-a4a4-c6a544a0cddd
Catalogue record
Date deposited: 15 Oct 1999
Last modified: 07 Jan 2022 21:08
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Contributors
Author:
S.K. Rotich
Author:
J.G. Smith
Author:
A.G.R. Evans
Author:
A. Brunnschweiller
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