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A novel micromachined pump based on thick-film piezoelectric actuation

A novel micromachined pump based on thick-film piezoelectric actuation
A novel micromachined pump based on thick-film piezoelectric actuation
0924-4247
98-103
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Harris, N
237cfdbd-86e4-4025-869c-c85136f14dfd
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Harris, N
237cfdbd-86e4-4025-869c-c85136f14dfd
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565

Koch, M, Harris, N, Evans, A G R, White, N M and Brunnschweiler, A (1998) A novel micromachined pump based on thick-film piezoelectric actuation. Sensors and Actuators A: Physical, A70, 98-103.

Record type: Article
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1998SandAmicropump.pdf - Version of Record
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More information

Published date: 1998
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 251186
URI: http://eprints.soton.ac.uk/id/eprint/251186
ISSN: 0924-4247
PURE UUID: d32899e9-ead0-4862-ad96-3863f64dff64
ORCID for N Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 09 Jul 2002
Last modified: 15 Mar 2024 02:46

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Contributors

Author: M Koch
Author: N Harris ORCID iD
Author: A G R Evans
Author: N M White ORCID iD
Author: A Brunnschweiler

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