Beeby, SP and White, NM (1999) Thick-film printed PZT actuator and polymer masking layers for micromachined silicon devices. Proceedings of Sensors and their Applications X. pp. 131-136 .
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Published date: September 1999
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Proceedings of Sensors and their Applications X, 1999-08-31
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EEE
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Local EPrints ID: 251207
URI: http://eprints.soton.ac.uk/id/eprint/251207
ISBN: 07503-06254
PURE UUID: 36b0aefa-86a5-4413-b4fd-0a04cba5ec74
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Date deposited: 21 Oct 1999
Last modified: 11 Dec 2021 03:01
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Author:
SP Beeby
Author:
NM White
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