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Thick-film printed PZT actuator and polymer masking layers for micromachined silicon devices

Thick-film printed PZT actuator and polymer masking layers for micromachined silicon devices
Thick-film printed PZT actuator and polymer masking layers for micromachined silicon devices
07503-06254
131-136
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP and White, NM (1999) Thick-film printed PZT actuator and polymer masking layers for micromachined silicon devices. Proceedings of Sensors and their Applications X. pp. 131-136 .

Record type: Conference or Workshop Item (Other)

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More information

Published date: September 1999
Venue - Dates: Proceedings of Sensors and their Applications X, 1999-08-31
Organisations: EEE

Identifiers

Local EPrints ID: 251207
URI: http://eprints.soton.ac.uk/id/eprint/251207
ISBN: 07503-06254
PURE UUID: 36b0aefa-86a5-4413-b4fd-0a04cba5ec74
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 21 Oct 1999
Last modified: 11 Dec 2021 03:01

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Contributors

Author: SP Beeby ORCID iD
Author: NM White ORCID iD

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