Beeby, SP, Stuttle, M, Papakostas, T and White, NM (1999) A low-cost micromachined silicon capacitive pressure sensor for industrial applications. Proceedings of Sensors and their Applications X. pp. 131-136 .
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Published date: September 1999
Venue - Dates:
Proceedings of Sensors and their Applications X, 1999-08-31
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EEE
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Local EPrints ID: 251209
URI: http://eprints.soton.ac.uk/id/eprint/251209
ISBN: 07503-06254
PURE UUID: e10652e2-baad-4991-ab9f-06f1d41b12a5
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Date deposited: 21 Oct 1999
Last modified: 11 Dec 2021 03:01
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Contributors
Author:
SP Beeby
Author:
M Stuttle
Author:
T Papakostas
Author:
NM White
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