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Silicon micromachining processes combined with thick-film printed PZT actuators for MicroElectroMechanical systems

Silicon micromachining processes combined with thick-film printed PZT actuators for MicroElectroMechanical systems
Silicon micromachining processes combined with thick-film printed PZT actuators for MicroElectroMechanical systems
0167-577X
187-91
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Blackburn, A
bcee4783-8ea6-45cf-9f19-219b6e846bab
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Blackburn, A
bcee4783-8ea6-45cf-9f19-219b6e846bab
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP, Blackburn, A and White, NM (1999) Silicon micromachining processes combined with thick-film printed PZT actuators for MicroElectroMechanical systems Materials Letters, 40, pp. 187-91.

Record type: Article

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More information

Published date: October 1999
Organisations: EEE

Identifiers

Local EPrints ID: 251210
URI: http://eprints.soton.ac.uk/id/eprint/251210
ISSN: 0167-577X
PURE UUID: 21add39a-645e-4c2f-a291-4464789685f9
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 26 Oct 1999
Last modified: 18 Jul 2017 10:11

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Contributors

Author: SP Beeby ORCID iD
Author: A Blackburn
Author: NM White ORCID iD

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