Beeby, SP, Blackburn, A and White, NM (1999) Silicon micromachining processes combined with thick-film printed PZT actuators for MicroElectroMechanical systems. Materials Letters, 40, 187-91.
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Published date: October 1999
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EEE
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Local EPrints ID: 251210
URI: http://eprints.soton.ac.uk/id/eprint/251210
ISSN: 0167-577X
PURE UUID: 21add39a-645e-4c2f-a291-4464789685f9
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Date deposited: 26 Oct 1999
Last modified: 09 Jan 2022 02:45
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Author:
SP Beeby
Author:
A Blackburn
Author:
NM White
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