The University of Southampton
University of Southampton Institutional Repository

Processing of PZT piezoelectric thick-films on silicon for microelectromechanical systems

Processing of PZT piezoelectric thick-films on silicon for microelectromechanical systems
Processing of PZT piezoelectric thick-films on silicon for microelectromechanical systems
0960-1317
218-29
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Blackburn, A
bcee4783-8ea6-45cf-9f19-219b6e846bab
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Blackburn, A
bcee4783-8ea6-45cf-9f19-219b6e846bab
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP, Blackburn, A and White, NM (1999) Processing of PZT piezoelectric thick-films on silicon for microelectromechanical systems Journal of Micromechanics and Microengineering, 9, (3), pp. 218-29.

Record type: Article

Full text not available from this repository.

More information

Published date: 1999
Organisations: EEE

Identifiers

Local EPrints ID: 251211
URI: http://eprints.soton.ac.uk/id/eprint/251211
ISSN: 0960-1317
PURE UUID: ec04e35a-3aab-4f44-8c3c-4fcd22a3160c
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 21 Oct 1999
Last modified: 18 Jul 2017 10:11

Export record

Contributors

Author: SP Beeby ORCID iD
Author: A Blackburn
Author: NM White ORCID iD

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×