Enhanced pattern area density proximity effect correction
Enhanced pattern area density proximity effect correction
In this article, we describe and analyze the sources of correction error in the pattern area density proximity effect correction (PADPEC) method of Murai et al [F. Murai, H. Yoda, S. Okazaki, N Saitou and Y. Sakatini, J. Vac. Sci. Technol. B 10, 3072 (1992)]. By focussing on the dominant contribution to the overall error, we are able to enhance the technique further, developing the enhanced PADPEC, or EPADPEC method. EPADPEC further reduces linewidth errors by factors ranging from 4 to 11, while increasing the computation time by a factor of only 1.23. [Migrating EPADPEC to a dedicated (parallel) environment will enable the data throughput to be dramatically increased.]
Ea, C.S.
9088847d-15ec-4e43-b3bd-d35d6cd1c1cf
Brown, A.D.
5c19e523-65ec-499b-9e7c-91522017d7e0
March 1999
Ea, C.S.
9088847d-15ec-4e43-b3bd-d35d6cd1c1cf
Brown, A.D.
5c19e523-65ec-499b-9e7c-91522017d7e0
Ea, C.S. and Brown, A.D.
(1999)
Enhanced pattern area density proximity effect correction.
Abstract
In this article, we describe and analyze the sources of correction error in the pattern area density proximity effect correction (PADPEC) method of Murai et al [F. Murai, H. Yoda, S. Okazaki, N Saitou and Y. Sakatini, J. Vac. Sci. Technol. B 10, 3072 (1992)]. By focussing on the dominant contribution to the overall error, we are able to enhance the technique further, developing the enhanced PADPEC, or EPADPEC method. EPADPEC further reduces linewidth errors by factors ranging from 4 to 11, while increasing the computation time by a factor of only 1.23. [Migrating EPADPEC to a dedicated (parallel) environment will enable the data throughput to be dramatically increased.]
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Published date: March 1999
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Local EPrints ID: 251291
URI: http://eprints.soton.ac.uk/id/eprint/251291
PURE UUID: ba78ae42-5636-4858-8820-2e2dfacc1c7f
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Date deposited: 27 Oct 1999
Last modified: 08 Jan 2022 08:45
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Author:
C.S. Ea
Author:
A.D. Brown
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