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Enhanced pattern area density proximity effect correction

Enhanced pattern area density proximity effect correction
Enhanced pattern area density proximity effect correction
In this article, we describve and analyze the sources of correction error in the pattern area density proximity effect correction (PADPEC) method of Murai et al [F. Murai, H. Yoda, S. Okazaki, N Saitou and Y. Sakatini, J. Vac. Sci. Technol. B 10, 3072 (1992)]. By focussing on the dominant contribution to the overall error, we are able to enhance the technique further, developing the enhanced PADPEC, or EPADPEC method. EPADPEC further reduces linewidth errors by factors ranging from 4 to 11, while increasing the computation time by a factor of only 1.23. [Migrating EPADPEC to a dedicated (parallel) environment will enable the data throughput to be dramatically increased.]
American Vacuum Society
Ea, C.S.
9088847d-15ec-4e43-b3bd-d35d6cd1c1cf
Brown, A.D.
5c19e523-65ec-499b-9e7c-91522017d7e0
Ea, C.S.
9088847d-15ec-4e43-b3bd-d35d6cd1c1cf
Brown, A.D.
5c19e523-65ec-499b-9e7c-91522017d7e0

Ea, C.S. and Brown, A.D. (1999) Enhanced pattern area density proximity effect correction

Record type: Other

Abstract

In this article, we describve and analyze the sources of correction error in the pattern area density proximity effect correction (PADPEC) method of Murai et al [F. Murai, H. Yoda, S. Okazaki, N Saitou and Y. Sakatini, J. Vac. Sci. Technol. B 10, 3072 (1992)]. By focussing on the dominant contribution to the overall error, we are able to enhance the technique further, developing the enhanced PADPEC, or EPADPEC method. EPADPEC further reduces linewidth errors by factors ranging from 4 to 11, while increasing the computation time by a factor of only 1.23. [Migrating EPADPEC to a dedicated (parallel) environment will enable the data throughput to be dramatically increased.]

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More information

Published date: March 1999
Organisations: EEE

Identifiers

Local EPrints ID: 251291
URI: http://eprints.soton.ac.uk/id/eprint/251291
PURE UUID: ba78ae42-5636-4858-8820-2e2dfacc1c7f

Catalogue record

Date deposited: 27 Oct 1999
Last modified: 18 Jul 2017 10:11

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Contributors

Author: C.S. Ea
Author: A.D. Brown

University divisions

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