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Enhanced pattern area density proximity effect correction

Ea, C.S. and Brown, A.D. (1999) Enhanced pattern area density proximity effect correction

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In this article, we describve and analyze the sources of correction error in the pattern area density proximity effect correction (PADPEC) method of Murai et al [F. Murai, H. Yoda, S. Okazaki, N Saitou and Y. Sakatini, J. Vac. Sci. Technol. B 10, 3072 (1992)]. By focussing on the dominant contribution to the overall error, we are able to enhance the technique further, developing the enhanced PADPEC, or EPADPEC method. EPADPEC further reduces linewidth errors by factors ranging from 4 to 11, while increasing the computation time by a factor of only 1.23. [Migrating EPADPEC to a dedicated (parallel) environment will enable the data throughput to be dramatically increased.]

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Published date: March 1999
Organisations: EEE


Local EPrints ID: 251291
PURE UUID: ba78ae42-5636-4858-8820-2e2dfacc1c7f

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Date deposited: 27 Oct 1999
Last modified: 18 Jul 2017 10:11

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Author: C.S. Ea
Author: A.D. Brown

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